Beta Graph API - deviceRunStates- filter not works

I need to server-side filter the results of a script execution on devices. I would like to retrieve the result for a specific device. To do this, I used this call:

GET /deviceManagement/deviceManagementScripts/{deviceManagementScriptId}/deviceRunStates/{deviceManagementScriptDeviceStateId}
Documentation: Get deviceManagementScriptDeviceState - Microsoft Graph beta

I queried the resultMessage column and it works, but I can't filter for a single device. Here is my PowerShell code:

$TargetRunStateId = "${ScriptId}:${DeviceId}" 

$GraphCPU = "https://graph.microsoft.com/beta/deviceManagement/deviceManagementScripts/${ScriptId}/deviceRunStates/${TargetRunStateId}" 

$ResponseCPU = Invoke-RestMethod -Uri $GraphCPU -Headers $Headers -Method GET 

$ResponseCPU.value | Format-List

Error returned:

{
  "error": {
    "code": "No method match route template",
    "message": "No OData route exists that match template ~/singleton/navigation/key/navigation/key with http verb GET for request /DeviceFE/StatelessDeviceFEService/deviceManagement/deviceManagementScripts('${ScriptId}')/deviceRunStates('${ScriptId}:${DeviceId}').",
    "innerError": {
      "date": "2025-10-30T14:34:41",
      "request-id": "xx",
      "client-request-id": "xxxxxxx"
    }
  }
}

If I use this alternative code:

$TargetRunStateId = "${ScriptId}:${DeviceId}" 

$GraphCPU = "https://graph.microsoft.com/beta/deviceManagement/deviceManagementScripts/${ScriptId}/userRunStates/${ScriptId}:${userId}/deviceRunStates?`$filter=id eq '${TargetRunStateId}'" 

$ResponseCPU = Invoke-RestMethod -Uri $GraphCPU -Headers $Headers -Method GET 

$ResponseCPU.value | Format-List

It works in that it returns results, but the filter does not work, and it returns all deviceRunStates.

Could you help me on this ?